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Verionix' Vx-3100 is the first full-featured sensor capable of measuring the composition
of single or multiple-species gas flows in environments from 1 Torr to 15 psig. Self-contained with a microplasma light source, spectrometer, RF power suppler and microprocessor, the Vx-3100 provides a complete view into the transient and steady state
composition of gases found in many higher pressure processes and gas distribution networks, verifying gas purity and both increasing yield and tool productivity.
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- 1 Torr to 15 psig operating range
Powerful
and accurate gas compostion at high pressures
- Self-contained: No pumps or external RF power supplies
Eliminates cost, maintenance and footprint of
ancillary gear
- Configurable to detect single
or multiple-gas species
No waiting or reconfiguring your sensor to get results
- Detects
inert and diatomic gases
Measure composition of trace gases found in such common carrier gases as Argon Helium, Nitrogen, Oxygen
- Field-replaceable microplasma sensor cell
Perform routine sensor maintenance tasks quickly and easily
- Integrated light source, spectrometer and embedded data reduction capability
Simple installation on your gas supply line or chamber
- Ethernet, serial and Digital/Analog interface options
Choose the method best suited for your integration
- Powerful process fingerprinting capability
Verionix Viewer software makes process monitoring and diagnostics easy to implement and use
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