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Verionix' Vx-2300 sensor measures the composition
of single or multiple-species gas flows in vaccum environments as low as 0.01 to greater than 1 Torr, depending on gas species. The size of a cigar box, the Vx-2300's fully-integrated microplasma light source, spectrometer, RF power supply and microprocessor provides a complete view into the transient and steady state
composition of gases used in any vacuum-based production process, eliminating guesswork and increasing yield and
process tool productivity.
Compared to our legacy Vx-2100/Vx-2200-series sensors, the enhanced sensitivity and dynamic range of the Vx-2300 together with its even lower pressure operation make it our best low-pressure composition sensor yet.
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- 0.01 to 1 Torr operating range
Powerful
gas analysis at process-compatible pressures
- Self-contained: No pumps or external RF power supplies
Eliminates cost, maintenance and footprint of
ancillary gear
- Resists
corrosive gases and deposits
Characterize aggressive flourine and chlorine-based gas flows used in CVD, Etch and other processes
- Field-replaceable microplasma sensor cell
Perform routine sensor maintenance tasks quickly and easily
- For Plasma or "Non-plasma" processes
Eliminate guesswork surrounding non-plasma based processes
Etch endpoint perfromance based on actual exhaust composition
- Configurable to detect single
or multiple-gas species
No waiting or reconfiguring your sensor to get results
- Detects
inert and diatomic gases
New found visibility into trace gases found in such common carriet gases as Argon, Helium, Nitrogen and Oxygen.
- Integrated light source, spectrometer and embedded data reduction capability
Smple installation on your gas supply, chamber or exhaust line
- Ethernet, serial and Digital/Analog interface options
Choose the method best suited for your integration
- Powerful process fingerprinting capability
Verionix Viewer software makes process monitoring and diagnostics easy to implement and use
- Special designs for Deposition and Etch applications
Choose the sensor performance that’s right for your application
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